MAKING EXCELLENCE REPEATABLE
Feature-Rich IC6 Provides the Best Measurement Precision Possible
The IC6 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your position process. The IC6 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of .00433 A/s every 1/10 second. No other quartz crystal controller has the performance, quality, and features of the IC6, allowing you to make excellence repeatable.
Features at a Glance
- ModeLock technology ensures the highest, most stable resolution rate and thickness measurement available, even at very low rates
- Auto Z improves thickness accuracy by automatically determining the Z-ratio as material is deposited
- Up to six sources can be controlled simultaneously, independently or in any combination by one IC6, relieving the need for two or three controllers.
- Color TFT LCD display makes it easy to see whats going on with your process
- 10 Hz measurement
- +/-0.0035 Hz over 100ms sample
- USB data storage for screen shots, recipe storage and data-logging
- Thickness summing of multiple sources
- Measurement rate averaging for low density, very low rate materials (up to 30 seconds for use with stable sources for very low rate OLED dopant material deposition).
- Display rate resolution of 0.001/s
- Powerful I/O with flexibility to integrate into simple of complex systems (using expandable Inputs (28) and Outputs (24 Relays, 14 TTL outputs), and use of Logic Statements (100 Logic Statements)
- Can accommodate up to 50 processes of 200 layers each for a maximum of 10,000 layers
- Multiple sensor averaging for up to 8 sensors
- 4 meter XIU option for the ability to use long in-vacuum cables for large systems
- Non-deposit control allows for continuous source control as substrates are cycled through the deposition chamber
- 6 DAC outputs standard, 6 additional optional for source control, rate or thickness monitoring
- Optional Ethernet communications
- RoHS compliant
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
 |
Brochure - Crystal 12 Sensor for Quartz Crystal Deposition Controllers
English
|
|
|
Brochure - IC6 Thin Film Deposition Controller for Optical Applications
English
|
Catalogs:
|
|
Catalog - Thin Film Deposition Controllers, Monitors and Accessories
English
| Chinese
|
Operations and Maintenance Manuals:
技术资料:
|
|
Application Note - Auto-Z: A Path to Precise Control of Layer Thickness
English
|
|
|
Mass Determination with Piezoelectric Quartz Crystal Resonators
English
|
|
|
Reducing Process Variation Through Multiple Point Crystal Sensor Monitoring
English
|
|
|
Technical Note - The Technology of the Intelligent Oscillator for Quartz Crystal Measurement and Advantages for Thin Film Processes
English
|
|
 | | Learn more about the IC6 for Optical Applications |
|  | | Crystal 12 - Replaces crystals automatically without interrupting your process. |
|  | | Table of Density and Z-Ratio Values |
|
|
|
